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Delivers ultimate defect reduction in point-of-use photochemical dispense applications
Patented advanced two-stage dispense technology isolates filtration from dispense, maximizing defect reduction and improving yield without sacrificing dispense repeatability
A 50% footprint reduction saves valuable space in track equipment and enables two-stage performance in the same space as a single stage pump
Fill rate control and real-time pressure control maximize filter performance and prevent microbubble formation in even the most sensitive photochemicals
Dispense confirmation provides alarm notification of a partial or failed dispense, preventing costly wafer scrap due to coating problems
Constant pressure filtration optimizes filtration, minimizing defects and increasing yield
Brushless DC motor with closed-loop control delivers extreme repeatability at dispense rates down to 0.1 ml/sec
Disposable, self-contained Impact® 2 OF or Impact® Mini OF filters provide a clean connection and

Mykrolis Mini Pump

SKU: PA001
$1,000.00 Regular Price
$950.00Sale Price
  • Manufactures : Mykroils

    * Specification

    - Dispense Performance

    Dispense repeatability : <0.02mL 3 sigma

    Dispense volume : 0.1 - 10.0mL in 0.001 mL increments

    Dispense rate : 0.1 - 3.0 mL/sec in 0.001 mL/sec increments

    Viscosity range : 1-100 cP


  • Please contact us then we will follow your request for your delivery.

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